Number: 2001-025-1-500
Title: Critical evaluation of the state of the art of the analysis
of light elements in thin films
Task Group
Chairman: G. Friedbacher
Member: S. Dreer
and P. Wilhartitz
Completion Date: 2004 - Project completed
Objective:
The result of the project is a critical review and a guideline for
the analysis of light elements in thin films which is not available
up to date. Thus, it will be useful for scientists and technologists
developing and applying such films in a variety of fields.
Description:
The quantitative analysis of thin films containing light elements
is very important to improve the coating processes as well as the technological
properties of the products. In order to review the state of the art
of modern analytical techniques for such applications, the model systems
of SiOXNY and AlOXNY were selected. Over
1000 abstracts were screened and the relevant literature was evaluated
to give a comprehensive overview of instruments, analytical procedures
and results, film types, deposition methods, and investigation goals.
From more than 150 citations the limitations, drawbacks, and pitfalls
of the different methods were extracted and reviewed critically, while
in addition improvements were proposed where possible. These suggestions
are combined with the newest investigation results of the authors of
this paper. Based on all results, recommendations concerning the optimised
combination of analytical methods for different analytical problems
have been worked out. The applicability of the different methods of
analysis in combination to all related film systems was proven by analyzing
various multi-component systems containing light elements.
Progress:
Project completed - IUPAC Technical Report published in Pure
Appl. Chem.
76(6), 1161-1213, 2004
Last update: 28 July 2004
Questions
or Comments about this Project
Please contact the Coordinator