Excilamps as efficient UVVUV light sources*
Victor F. Tarasenko
High Current Electronics Institute, 4, Akademichesky
Ave., Tomsk, 634055, Russia
Abstract: Operating parameters of powerful UV and vacuum ultraviolet
(VUV) excilamps with different discharge geometry excited by capacitive
discharge, barrier discharge, glow discharge, and UV-preionized discharge
were investigated. Intense radiation of Ar2*, Kr2*, Xe2*, ArF*, KrBr*,
KrCl*, KrF*, XeI*, Cl2, XeBr*, XeCl*, XeF* molecules and I* atoms was
obtained in rare gas or in rare gasF2 (Br2, CH3Br, Cl2, Br2, HCl,
I2, NF3) mixtures.
* Lecture presented at the 15th International Symposium
on Plasma Chemistry, Orléans, France, 9-13 July 2001. Other presentations
are presented in this issue, pp. 317492.
** Corresponding author.
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